Fabrication of 128-element uncooled VOx thermal IR detectors

Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

Volumn 23, Issue 2, 2004, Pages 99-102

  Wang, Hong Chen ^a   Yi, Xin Jian ^a   Chen, Si Hai ^a   Huang, Guang ^a   Xiao, Jing ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Infrared detector; Microbridge array; Microbridge structure; Uncooled; Vanadium oxides thin film

Indexed keywords

ETCHING; OXIDES; THERMAL CONDUCTIVITY; THERMAL EFFECTS; THIN FILMS; VANADIUM;

MICROBRIDGE ARRAY; MICROBRIDGE STRUCTURE; UNCOOLED; VANADIUM OXIDES THIN FILM;

INFRARED DETECTORS;

EID: 3142537046     PISSN: 10019014     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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