Substrate-induced stress and transformation characteristics of a deposited Ti-Ni-Cu thin film

Philosophical Magazine

Volumn 84, Issue 19, 2004, Pages 1919-1936

  Liu, Yono ^a   Huang, Xu ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FILM GROWTH; HYSTERESIS; PHASE TRANSITIONS; SHAPE MEMORY EFFECT; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS;

SUBSTRATE INDUCED STRESSES; TRANSFORMATION HYSTERESIS; TRANSFORMATION STRESSES;

TITANIUM ALLOYS;

EID: 3142523731     PISSN: 14786435     EISSN: None     Source Type: Journal    
DOI: 10.1080/14786430410004500     Document Type: Article

References (32)

1. ALEXOPOULOS, P. S., and O'SULLIVAN, T. C., 1990, A. Rev. Mater. Sci., 20, 391.
2. CRACIUNESCU, C., LI, J., and WUTTIG, M., 2003, Scripta mater., 48, 65.
3. DELAEY, L., 2001, Phase Transformations in Materials, edited by G. Kostorz (Weinheim: Wiley-VCH), pp. 583-654.
4. GRUMMON, D. S., and ZHANG, J. P., 2001, Phys. Stat. sol. (a), 186, 17.
5. GRUMMON, D. S., ZHANG, J. P., and PENCE, T. J., 1999, Mater. Sci. Engng, A273-A275, 722.
6. HUANG, X., and LIU, Y., 2002, Smart Materials II, Proceedings of the SPIE, Vol. 4934 (Bellingham, Washington: SPIE), p. 210.
7. HUANG, X., Liu, Y., LING, S. F., ZHANG, H. H., and HUANG, W. M., 2003, Surf. Coat. Technol., 167, 148.
8. KAMIYA, S., SATO, M., SAKA, M., and ABE, H., 1999, J. appl. Phys., 86, 224.
9. KRULEVITCH, P., LEE A. P., RANSEY, P. B., TREVINO, J. C., HAMILTON, J., and NORTHRUP, M. A., 1996a, J. Microelectromech. Systems, 5, 270.
10. KRULEVITCH, P., RAMSEY, P. B., MAKOWIECKI, D. M., LEE, A. P., NORTHRUP, M. A., and JOHNSON, G. C., 1996b, Thin Solid Films, 274, 101.
11. LIU, Y. N., and MCCORMlCK, P. G., 1994, Acta mater., 42, 2401.
12. MCCORMICK, P. G., and LIU, Y. N., 1994, Acta mater., 42, 2407.
13. MIYAZAKI, S., IMAI, T., IGO, Y., and OTSUKA, K., 1986, Metall Trans. A, 17, 115.
14. NIX, W. D., 1989, Metall. Trans. A, 20, 2217.
15. OLSON, G. B., and COHEN, M., 1975, Scripta metall., 9, 1247.
16. ORTIN, J., and DELAEY, L., 2002, Int. J. Non-Linear Mech., 37, 1275.
17. ORTIN, J., and PLANES, A., 1988, Acta metall., 36, 1873; 1989, ibid., 37, 1433.
18. ORTIN, J., and PLANES, A., 1988, Acta metall., 36, 1873; 1989, ibid., 37, 1433.
19. PROFT, J. L., and DUERIG, T. W., 1990, Engineering Aspects of Shape Memory Alloys, edited by T. W. Duerig, K. N. Melton, D. Stöckel and C. M. Wayman (London: Butterworth-Heinemann), p. 115.
20. ROY, D., BARBER, Z. H., and CLYNE, T. W., 2003, J. appl. Phys., 94, 136.
21. ROYTBURD, A. L., KIM, T. S., SU, Q., SLUTSKER, J., and WUTTIG, M., 1998, Acta mater., 46, 5095.
22. SABURI, T., 1998, Shape Memory Materials, edited by K. Otsuka and C. M. Wayman (Cambridge University Press), pp. 49-96.
23. STEMMER, S., DUSCHER, G., SCHEU, C., HEUER, A. H., and RUHLE, M. J., 1997, Mater. Res., 12, 1734.
24. THORNTON, J. A., 1982, Deposition Technologies for Films and Coatings: Developments and Applications, edited by R. F. Bunshah et al. (Park Ridge, New Jersey: Noyes), chapter 5, pp. 170-243.
25. TONG, H. C., and WAYMAN, C. M., 1974, Acta metall., 22, 887; 1975, ibid., 23, 209.
26. TONG, H. C., and WAYMAN, C. M., 1974, Acta metall., 22, 887; 1975, ibid., 23, 209.
27. VON KAENEL, Y., STIEGLER, J., MICHLER, J., and BLANK, E., 1997, J. appl. Phys., 81, 1726.
28. WINZEK, B., and QUANDT, E., 1999, Z. Metallk., 90,769; 2000, Mater. Res. Soc. Symp. Proc., 604, 117.
29. WINZEK, B., and QUANDT, E., 1999, Z. Metallk., 90,769; 2000, Mater. Res. Soc. Symp. Proc., 604, 117.
30. WOLLANTS, P., ROOS, J. R., and DELAEY, L., 1993, Prog. Mater. Sci., 37, 227.
31. WU, S. K., CHEN, J. Z., WU, Y. J., WANG, J. Y., YU, M. N., CHEN, F. R., and KAI, J. J., 2001, Phil. Mag. A, 81, 1939. ZHANG, J. P., and GRUMMON, D. S., 1997, Mater. Res. Soc. Symp. Proc., 459, 451.
32. WU, S. K., CHEN, J. Z., WU, Y. J., WANG, J. Y., YU, M. N., CHEN, F. R., and KAI, J. J., 2001, Phil. Mag. A, 81, 1939. ZHANG, J. P., and GRUMMON, D. S., 1997, Mater. Res. Soc. Symp. Proc., 459, 451.