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Volumn 459, Issue , 1997, Pages 451-457
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Stress evolution during crystallization and isothermal annealing of titanium-nickel on (100) Si
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
ANNEALING;
CRYSTAL ORIENTATION;
CRYSTALLIZATION;
MARTENSITIC TRANSFORMATIONS;
RELAXATION PROCESSES;
RESIDUAL STRESSES;
SILICON WAFERS;
SPUTTER DEPOSITION;
THERMAL CYCLING;
THERMAL EFFECTS;
THIN FILMS;
ISOTHERMAL ANNEALING;
NEAR EQUIATOMIC ALLOYS;
REVERSIBLE ACTUATION;
STRESS EVOLUTION;
WAFER CURVATURE METHOD;
TITANIUM ALLOYS;
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EID: 0030648450
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (18)
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References (17)
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