Characterization of a modified Bosch-type process for silicon mold fabrication

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 905-910

  Jo, S B ^a   Lee, M W ^a   Lee, S G ^a   Lee, E H ^a   Park, S G ^a   O, B H ^a  

^a Inha University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MICROSTRUCTURE; PASSIVATION; PLASTIC FILMS;

BOSCH-TYPE PROCESS; OPTICAL POWER SPLITTERS; SILICON MOLD FABRICATION;

SILICON;

EID: 31144433878     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1943467     Document Type: Conference Paper

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