PZT thick films on LTCC substrates with an interposed alumina barrier layer

Journal of the European Ceramic Society

Volumn 26, Issue 6, 2006, Pages 897-900

  Hrovat, Marko ^a   Holc, Janez ^a   Drnovšek, Silvo ^a   Belavič, Darko ^b   Cilenšek, Jena ^a   Kosec, Marija ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b doo   (Slovenia)

Author keywords

Al2O3; Films; Pb(Zr,Ti)O3

Indexed keywords

ALUMINA; CERAMIC MATERIALS; COMPOSITION EFFECTS; DETERIORATION; ELECTRIC PROPERTIES; FIRING (OF MATERIALS); PIEZOELECTRIC MATERIALS; SINTERING; STRUCTURE (COMPOSITION); SUBSTRATES; THERMAL EFFECTS; THICK FILMS;

ALUMINA BARRIER LAYER; LEAD ZIRCONIUM TITANATE (PZT); LOW-TEMPERATURE COFIRED CERAMIC (LTCC) MATERIALS;

LEAD COMPOUNDS;

ALUMINA; CERAMIC MATERIALS; COMPOSITION EFFECTS; DETERIORATION; ELECTRIC PROPERTIES; FIRING (OF MATERIALS); LEAD COMPOUNDS; PIEZOELECTRIC MATERIALS; SINTERING; STRUCTURE (COMPOSITION); SUBSTRATES; THERMAL EFFECTS; THICK FILMS;

EID: 30844467502     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2004.12.025     Document Type: Article

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