Bi-layered PZT films by combining thick and thin film technology

Journal of the European Ceramic Society

Volumn 24, Issue 6, 2004, Pages 1101-1105

  Gebhardt, S ^a   Seffner, L ^a   Schonecker A ^a   Rodel J ^b   Beckert, W ^b   Kreher, W ^b   Sotnikov, A ^c   Haßler W ^c   Reuter, S ^d   Hubler A ^d  

^a FRAUNHOFER INSTITUTE FOR CERAMIC TECHNOLOGIES AND SYSTEMS   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^c IFW DRESDEN   (Germany)

^d CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Defects; Electrical properties; Films; PZT; Sol gel process

Indexed keywords

ELECTROSTATIC PRINTING; LEAD COMPOUNDS; MICROSTRUCTURE; PYROELECTRICITY; SENSORS; THIN FILMS; TRANSDUCERS;

PRESSURE SENSORS;

THICK FILMS;

CERAMICS; FILM;

EID: 0942278178     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-2219(03)00551-X     Document Type: Article

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