Development of a two-dimensional phase-grating mask for fabrication of an analog-resist profile

Applied Optics

Volumn 45, Issue 1, 2006, Pages 33-43

  Sung, Jin Won ^a   Hockel, Heidi ^a   Brown, Jeremiah D ^a   Johnson, Eric G ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTRONS; LIGHTING; MICROOPTICS; OPTICAL INSTRUMENT LENSES;

DIFFRACTION EFFICIENCY CURVE; DUTY-CYCLE DISTRIBUTION; PHASE-GRATING MASK;

PHOTOLITHOGRAPHY;

EID: 30844435727     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.000033     Document Type: Article

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