Non destructive electrical defect characterisation and topography of silicon wafers and epitaxial layers

Materials Research Society Symposium Proceedings

Volumn 864, Issue , 2005, Pages 549-554

  Dornich, K ^a   Hahn, T ^a   Niklas, J R ^a  

^a TU BERGAKADEMIE FREIBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; CRYSTAL DEFECTS; ELECTRIC PROPERTIES; EPITAXIAL GROWTH;

ELECTRICAL DEFECT; EPITAXIAL LAYERS;

SILICON WAFERS;

EID: 30544450196     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-864-e11.2     Document Type: Conference Paper

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