Sensitive detection of laser damage to Mo/Si multilayers by picosecond ultrasonics

Applied Physics B: Lasers and Optics

Volumn 79, Issue 1, 2004, Pages 107-112

  Pu, N W ^a   Pan, E Y ^a   Bokor, J ^b  

^a NATIONAL DEFENSE UNIVERSITY   (Taiwan)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; DEMODULATION; HEAT RESISTANCE; LASER BEAM EFFECTS; LITHOGRAPHY; PHASE TRANSITIONS; PHONONS; RAMAN SCATTERING; REFRACTIVE INDEX; STRESS RELAXATION; SUPERLATTICES; SYNCHROTRON RADIATION; THIN FILMS; ULTRASONICS; ULTRAVIOLET RADIATION; X RAY DIFFRACTION;

INTERFACIAL BONDING; MATERIAL INTERDIFFUSION; PICOSECOND ULTRASONICS; SURFACE TARNISHING;

LASER DAMAGE;

EID: 3042790022     PISSN: 09462171     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00340-004-1462-1     Document Type: Article

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