Film-stress-induced deformation of EUV reflective optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3676, Issue II, 1999, Pages 724-734

  Spence, Paul A ^a   Kanouff, Michael P ^a   Ray Chaudhuri, Avijit K ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; DISTORTION (WAVES); FINITE ELEMENT METHOD; LIGHT REFLECTION; MATHEMATICAL MODELS; MIRRORS; MULTILAYERS; OPTIMIZATION; REFLECTIVE COATINGS; SUBSTRATES; ULTRAVIOLET RADIATION; WAVEFRONTS;

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY; OPTICAL ANALYSIS;

PHOTOLITHOGRAPHY;

EID: 0032652064     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.351166     Document Type: Conference Paper

References (6)