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Volumn 84, Issue 22, 2004, Pages 4496-4498
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High-quality radio-frequency inductors on silicon using a hybrid ferrite technology
a
EPFL
(Switzerland)
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS ALLOYS;
CAPACITANCE;
COPPER;
DIELECTRIC MATERIALS;
ELECTRIC CONDUCTIVITY;
ELECTRIC RESISTANCE;
ELECTROPLATING;
ETCHING;
FERRITE APPLICATIONS;
INDUCTANCE;
MAGNETIC FILMS;
MAGNETIC FLUX;
Q FACTOR MEASUREMENT;
SILICON;
ELECTROPLATING COIL TECHNOLOGY;
MICROPATTERNING;
PARASITIC CAPACITANCE;
QUALITY FACTOR;
ELECTRIC INDUCTORS;
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EID: 3042738111
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1756677 Document Type: Article |
Times cited : (20)
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References (14)
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