Effects of focus change on the fabrication of tungsten nanowire by electron-beam-induced deposition

Nanotechnology

Volumn 15, Issue 6, 2004, Pages

  Liu, Zhi Quan ^a   Mitsuishi, Kazutaka ^a   Furuya, Kazuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; DEPOSITION; ELECTRON BEAMS; MORPHOLOGY; PRESSURE EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; VAPORS;

HIGH-ENERGY ELECTRONS; LOW-ENERGY ELECTRONS; NANOWIRES;

NANOTECHNOLOGY;

EID: 3042648219     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/6/019     Document Type: Conference Paper

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