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Volumn 2002-January, Issue , 2002, Pages 73-78
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Gate oxide reliability of drain-side stresses compared to gate stresses
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Author keywords
Circuits; Instruments; MOSFETs; Predictive models; Silicon; Stress; Voltage
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Indexed keywords
ELECTRIC POTENTIAL;
GATES (TRANSISTOR);
INSTRUMENTS;
NETWORKS (CIRCUITS);
RELIABILITY;
SILICON;
STRESSES;
DRAIN STRESS;
GATE OXIDE;
GATE OXIDE BREAKDOWN;
GATE OXIDE RELIABILITY;
GATE STRESS;
MOSFETS;
PREDICTIVE MODELS;
TCAD SIMULATION;
ELECTRIC BREAKDOWN;
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EID: 3042608960
PISSN: 15417026
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/RELPHY.2002.996612 Document Type: Conference Paper |
Times cited : (5)
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References (9)
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