Production of multicharged iron ions by using pyrolytic boron nitride crucible and application to material processing

Review of Scientific Instruments

Volumn 75, Issue 5 PART II, 2004, Pages 1919-1921

  Kato, Yushi ^a   Tomida, Masashi ^a   Ishii, Shigeyuki ^a  

^a TOYAMA PREFECTURAL UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BORON COMPOUNDS; CHARGED PARTICLES; DEGRADATION; ELECTRIC POTENTIAL; ELECTRON CYCLOTRON RESONANCE; EVAPORATION; ION BEAMS; PHOTOCATALYSIS; PYROLYSIS; RADIATION SHIELDING; SUBSTRATES; ULTRAVIOLET RADIATION;

CURRENT DENSITY ESTIMATION; MATERIAL PROCESSING; MULTICHARGED IONS; STEP-DOWN RING TRANSFORMERS;

IRON COMPOUNDS;

EID: 3042606352     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1699511     Document Type: Conference Paper

References (11)

1. D. Leong, M. Harry, K. J. Reeson, and K. P. Homewood, Nature (London) 387, 686 (1997); Y. Makita, Proceeding of Japan-UK Joint Workshop on Kankyou, Semiconductors, Tsukuba, 2000.
2. D. Leong, M. Harry, K. J. Reeson, and K. P. Homewood, Nature (London) 387, 686 (1997); Y. Makita, Proceeding of Japan-UK Joint Workshop on Kankyou, Semiconductors, Tsukuba, 2000.
3. Y. Kato, S. Sugiyama, and S. Ishii, Ion Implant. Technol. 1, 546 (2001).
4. S. Sugiyama, Y. Kato, and S. Ishii, Rev. Sci. Instrum. 73, 542 (2002).
5. Y. Kato, S. Sugiyama, and S. Ishii, Ion Implant. Technol. 1, 413 (2004).
6. H. Koivisto, J. Arje, and M. Nurmia, Rev. Sci. Instrum. 69, 785 (1998).
7. A. Ullrich, P. Grübling, and X. Zschornack, Rev. Sci. Instrum. 69, 813 (1998).
8. R. Geller, P. Ludwig, and G. Melin, Rev. Sci. Instrum. 63, 2795 (1992).
9. Y. Kato, S. Sugiyama, and S. Ishii, Rev. Sci. Instrum. 73, 601 (2002).
10. Y. Kato, A. Fukukawa, and S. Ishii, Ion Implant. Technol. 1, 338 (1997).
11. M. Miyata, E. Honbo, Y. Kato, and S. Ishii, Proceedings of the Joint Conference of the 16th European Conference on Atomic and Molecular Physics of Ionized Cases (ESCAM PIG 16) and the 5th International Conference on Reactive Plasmas (ICRP, Grenoble, France, 2002), Vol. 2, pp. 345-346.