Production of [formula omitted] metal ion electron cyclotron resonance plasmas and ion beams using volatile compounds

Review of Scientific Instruments

Volumn 69, Issue 2, 1998, Pages 813-815

  Ullrich, A ^a   Grubling P ^a   Zschornack, G ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84992140214     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148575     Document Type: Conference Paper

References (17)

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