Wet chemical etching of AlN single crystals

MRS Internet Journal of Nitride Semiconductor Research

Volumn 7, Issue , 2002, Pages

  Zhuang, D ^a   Edgar, J H ^a   Liu, Lianghong ^a   Liu, B ^a   Walker, L ^b  

^a Kansas State University   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; DISLOCATIONS (CRYSTALS); ELECTRIC CONDUCTIVITY; EPITAXIAL GROWTH; ETCHING; NUCLEATION; POTASSIUM COMPOUNDS; SINGLE CRYSTALS; THERMAL CONDUCTIVITY;

DISLOCATION DENSITY; HILLOCK DENSITY; POLAR STRUCTURES; WET CHEMICAL ETCHING;

ALUMINUM NITRIDE;

EID: 3042591640     PISSN: 10925783     EISSN: None     Source Type: Journal    
DOI: 10.1557/s1092578300000302     Document Type: Article

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