Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 44, Issue 28-32, 2005, Pages

  Kamiura, Yoichi ^a   Kaneshiro, Masahiro ^a   Tamura, Jin ^a   Ishiyama, Takeshi ^a   Yamashita, Yoshifumi ^a   Mitani, Tomotsugu ^b   Mukai, Takashi ^b  

^a OKAYAMA UNIVERSITY   (Japan)

^b NICHIA CORPORATION   (Japan)

Author keywords

Blue emission; GaN; Hydrogen; Mg; Photoluminescence; Remote plasma

Indexed keywords

HYDROGEN; MAGNESIUM PRINTING PLATES; PHOTOLUMINESCENCE; PLASMAS; SEMICONDUCTOR DOPING; VAPORS;

ATOMIC HYDROGEN; BLUE EMISSION; REMOTE PLASMA;

GALLIUM NITRIDE;

EID: 30344481943     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.L926     Document Type: Article

References (11)

1. C. H. Kuo, S. J. Chang, Y. K. Su, L. W. Wu, J. K. Sheu, C. H. Chen and G. C. Chi: Jpn. J. Appl. Phys. 41 (2002) L112.
2. S.-W. Kim, J.-M. Lee, C. Huh, N.-M. Park, H.-S. Kim, I.-H. Lee and S.-J. Park: Appl. Phys. Lett. 76 (2000) 3079.
3. M. Takeya and M. Ikeda: Jpn. J. Appl. Phys. 40 (2001) 6260.
4. S. Nakamura, N. Iwasa, M. Senoh and T. Mukai: Jpn. J. Appl. Phys. 31 (1992) 1258.
5. W. Götz, N. M. Johnson, J. Walker, D. P. Bour. H. Amano and I. Akasaki: Appl. Phys. Lett. 67 (1995) 2666.
6. A. Y. Polyakov, N. B. Smirnov, A. V. Gororkov, K. H. Baik, S. J. Pearton, B. Luo, F. Ren and J. M. Zavada: J. Appl. Phys. 94 (2003) 3960.
7. T. Hashizume and R. Nakasaki: Appl. Phys. Lett. 80 (2002) 4564.
8. American Institute of Physics Handbook, ed. D. E. Gray (McGraw-Hill, New York, 1972) 3rd ed., p. 7-27.
9. CRC Handbook of Chemistry and Physics, ed. R. C. Weast (CRC Press, Boca Raton, 1987) 68th ed., p. E-201.
10. U. Kaufmann, M. Kunzer, M. Maier, H. Obloh, A. Ramakrishnan, B. Santic and P. Schlotter: Appl. Phys. Lett. 72 (1998) 1326.
11. O. Gelhausen, M. R. Phillips, E. M. Goldys, T. Paskova, B. Monemar, M. Strassburg and A. Hoffmann: Phys. Rev. B 69 (2004) 125210.