Characterization of 5-aminotetrazole as a corrosion inhibitor in copper chemical mechanical polishing

Journal of the Electrochemical Society

Volumn 152, Issue 12, 2005, Pages

  Lee, Jong Won ^a,b   Kang, Min Cheol ^a,b   Kim, Jae Jeong ^a  

^a Seoul National University   (South Korea)

^b ELECTROCHEMICAL SOCIETY   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

5-AMINOTETRAZOLE; METAL LINES;

CHEMICAL MECHANICAL POLISHING; CONCENTRATION (PROCESS); CORROSION INHIBITORS; FOURIER TRANSFORMS; METALLIZING; POLYMERIZATION; SOLUBILITY;

COPPER;

EID: 30344446006     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2104247     Document Type: Article

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