Shaping of thin grazing-incidence reflection grating substrates via magnetorheological finishing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5900, Issue , 2005, Pages 1-7

  Heilmann, Ralf K ^a   Akilian, Mireille ^a   Chang, Chi Hao ^a   Hallock, Robert ^b   Cleaveland, Ed ^b   Schattenburg, Mark L ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b QED TECHNOLOGIES   (United States)

Author keywords

Constellation X; Figure metrology; Magnetorheological finishing; Metrology truss; Reflection gratings; Thin foil optics; X ray optics

Indexed keywords

FABRICATION; FINISHING; MEASUREMENTS; RHEOLOGY; SILICON WAFERS; TRUSSES;

FIGURE METROLOGY; METROLOGY TRUSS; REFLECTION GRATINGS; THIN-FOIL OPTICS;

DIFFRACTION GRATINGS;

EID: 29844453651     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.617788     Document Type: Conference Paper

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