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Volumn 133-134, Issue , 2000, Pages 528-534
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Hybridization of the polymer multi-layer (PML) deposition process
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Author keywords
[No Author keywords available]
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Indexed keywords
CONDENSATION;
EVAPORATION;
GLOW DISCHARGES;
MOLECULAR WEIGHT;
MONOMERS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYMERIZATION;
POLYMERS;
VAPOR PRESSURE;
PLASMA POLYMERIZATION;
POLYMER MULTILAYER DEPOSITION;
VACUUM DEPOSITED COATINGS;
COATING PROCESS;
DEPOSITION;
POLYMER MULTILAYER;
POLYMERIZATION;
PROCESS DESIGN;
REACTIVE FLUID;
VAPOR PRESSURE;
PLASMA TREATMENT;
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EID: 0034310639
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(00)00954-3 Document Type: Article |
Times cited : (10)
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References (12)
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