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Volumn 133-134, Issue , 2000, Pages 528-534

Hybridization of the polymer multi-layer (PML) deposition process

Author keywords

[No Author keywords available]

Indexed keywords

CONDENSATION; EVAPORATION; GLOW DISCHARGES; MOLECULAR WEIGHT; MONOMERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERIZATION; POLYMERS; VAPOR PRESSURE;

EID: 0034310639     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00954-3     Document Type: Article
Times cited : (10)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.