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Superlattices and Microstructures

Volumn 39, Issue 1-4, 2006, Pages 50-59

Deposition of ZnO films grown by pulsed laser deposition for film bulk acoustic resonators

(5) Kim, Gun Hee a Ahn, Byung Du a Kang, Hong Seong a Lim, Sung Hoon a Lee, Sang Yeol a

a Yonsei University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ALUMINUM; ELECTRIC CONDUCTIVITY; FILM GROWTH; NEODYMIUM LASERS; PULSED LASER DEPOSITION; THIN FILMS;

FILM BULK ACOUSTIC RESONATORS (FBAR); ND:YAG LASER; SILICON SUBSTRATES; ZNO FILMS;

ZINC OXIDE;

EID: 29444434470 PISSN: 07496036 EISSN: 10963677 Source Type: Journal
DOI: 10.1016/j.spmi.2005.08.074 Document Type: Article

Times cited : (4)

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