A surface micromachining process for the development of a medium-infrared tuneable Fabry-Perot interferometer

Sensors and Actuators, A: Physical

Volumn 113, Issue 1, 2004, Pages 39-47

  Calaza, Carlos ^a   Fonseca, Luis ^b   Moreno, Mauricio ^a   Marco, Santiago ^a   Cané, Carles ^b   Gracia, Isabel ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Fabry Perot interferometer; Internal stress and stress gradient; Surface micromachining

Indexed keywords

CANTILEVER BEAMS; CHEMICAL SENSORS; ELECTROSTATIC ACTUATORS; FABRY-PEROT INTERFEROMETERS; LIGHT TRANSMISSION; OPTICAL RESONATORS; REFLECTION; RESIDUAL STRESSES;

FULL WIDTH AT HALF MAXIMUM (FWMH); STRESS GRADIENT; SURFACE MICROMACHINING; WAVELENGTH TUNING;

MICROMACHINING;

EID: 2942694103     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.01.047     Document Type: Article

References (11)

1. D.I. Sebacher, in: J. Wormhoudt (Ed.), Infrared Methods for Gaseous Measurements, Marcel Dekker, New York, 1985, Chapter 6, pp. 247-274.
2. W. Schafer, M. Zochbauer, in: E. Wagner, R. Dandliker, K. Spenner (Eds.), Sensors, vol. 6, Wiley/VCH, Weinheim, 1992, Chapter 12, pp. 277-306.
3. M. Gebhard, W. Benecke, Concept of a miniaturized system for multicomponent gas analysis based on non-dispersive infrared techniques, in: Proceedings of the Micro Total Analysis Systems, Enschede, The Netherlands, 1994, pp. 279-282.
4. A. Corâci, C.G. Bostan, M. Simion, P. Ganea, A 2D micromachined sensor for the IR gas analyser, in: Proceedings of the Micromechanics Europe, Ulvik, Norway, 1998, pp. 210-213.
5. Alause H., Malzac J.P., Grasdepot F., Nouaze V., Hermann J., Knapp W. Micromachined optical tuneable filter for long-term stability gas sensors. IEE Proc. Optoelec. 144(5):1997;350-354.
6. M. Viitasalo, M. Hohtola, M. Blomberg, Ch. Helenelund, A. Torkely, A. Lehto, Carbon dioxide sensor based on micromachined Fabry-Perot interferometer, in: Proceedings of the Eighth International Fair and Congress for Sensors, Transducers & Systems, Sensor'97, Nürnberg, Germany, 1997, pp. 193-198.
7. Calaza C., Meca E., Marco S., Moreno M., Samitier J., Fonseca L., Gracia I., Cane C. Assessment of the final metrological characteristics of a MOEMS-based NDIR spectrometer through system modelling and data processing. IEEE Sens. J. 3(5):2003;587-594.
8. Greek S., Chitica N. Deflection of surface-micromachined devices due to internal, homogeneous or gradient stresses. Sens. Actuators A. 78:1999;1-7.
9. Boutry M., Bosseboeuf A., Grandchamp J.P., Coffignal G. Finite-element method analysis of freestanding microrings for thin-film tensile strain measurements. J. Micromech. Microeng. 7:1997;280-284.
10. C. Calaza, S. Marco, M. Moreno, L. Fonseca, C. Cane, I. Gracia, Modelling and simulation of an electrostatically actuated surface-micromachined tuneable Fabry-Perot interferometer for the medium IR spectral range, in: Proceedings of the EuroSimE 2001, Paris, France, April 2001, pp. 241-247.
11. Benítez M.A., Plaza J.A., Sheng S.Q., Esteve J. A new process for releasing micromechanical structures in surface micromachining. J. Micromech. Microeng. 6:1996;36-38.