Micromachined optical tunable filter for long term stability gas sensors

IEE Proceedings: Optoelectronics

Volumn 144, Issue 5, 1997, Pages 350-354

  Aiause, H ^a,c   Malzac, J P ^a,b   Grasdepot, F ^a   Nouaze, V ^a   Hermann, J ^a   Knap, W ^a,b  

^a UNIV MONTPELLIER   (France)

^b SCHLUMBERGER   (France)

^c CSEM   (Switzerland)

Author keywords

Gas sensors; Tunable optical filter

Indexed keywords

CHEMICAL SENSORS; ENERGY GAP; MICROMACHINING; SILICON WAFERS;

FABRY PEROT FILTERS;

OPTICAL FILTERS;

EID: 0031251205     PISSN: 13502433     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-opt:19971575     Document Type: Article

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