Assessment of the final metrological characteristics of a MOEMS-based NDIR spectrometer through system modeling and data processing

IEEE Sensors Journal

Volumn 3, Issue 5, 2003, Pages 587-594

  Calaza, Carlos ^a   Meca, E ^a   Marco, Santiago ^a   Moreno, Mauricio ^a   Samitier, J ^a   Fonseca, Luis ^b   Gracia I ^b   Cane C ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Fabry Perot; Non dispersive infrared (NDIR); Partial least squares (PLS) regression; Surface micromachining; Thermopiles

Indexed keywords

DATA PROCESSING; ELECTRIC FILTERS; GAS FUEL ANALYSIS; LEAST SQUARES APPROXIMATIONS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; REGRESSION ANALYSIS; SPECTROMETERS; SYSTEMS ANALYSIS; THERMOPILES;

FABRY-PEROT FILTERS; NON-DISPERSIVE INFRARED (NDIR) DETECTORS; PARTIAL LEAST SQUARES (PLS) REGRESSION; SURFACE MICROMACHINING;

OPTICAL SYSTEMS;

EID: 2942637535     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2003.817672     Document Type: Article

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