Self-assembly of micro- and nanoparticles on internal micromachined silicon surfaces

Sensors and Actuators, A: Physical

Volumn 113, Issue 1, 2004, Pages 124-131

  Vengallatore, Srikar ^a   Peles, Yoav ^b   Arana, Leonel R ^c   Spearing, S Mark ^d  

^a MCGILL UNIVERSITY   (Canada)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^c INTEL CORPORATION   (United States)

^d Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Biocompatibility; MEMS; Nanoparticles; Self assembly

Indexed keywords

BIOCOMPATIBILITY; COLLOIDS; ION IMPLANTATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NANOSTRUCTURED MATERIALS; SILICON; SURFACE PHENOMENA;

BIOMEMS; NANOPARTICLES; SILICON STRUCTURES; YITTRIA STABILIZED ZIRCONIA (YSZ);

SELF ASSEMBLY;

EID: 2942677027     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.03.066     Document Type: Article

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