Chemical phase separation in Zr silicate alloys: A spectroscopic study distinguishing between chemical phase separation with different degrees of micro- and nano-crystallinity

Journal of Non-Crystalline Solids

Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 151-154

  Rayner, G B ^a   Kang, D ^a   Lucovsky, G ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; CRYSTALLIZATION; DIELECTRIC MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NANOSTRUCTURED MATERIALS; PHASE SEPARATION; RAPID THERMAL ANNEALING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICA; SILICATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

COORDINATION SHELLS; DIFFRACTION PATTERNS; MICRO-CRYSTALLINITY; X-RAY ABSORPTION;

ZIRCONIUM ALLOYS;

EID: 2942620505     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.02.042     Document Type: Conference Paper

References (9)

1. Rayner G.B. Jr., Therrien R., Lucovsky G. MRS Symp. Proc. 611:2001;c13.1.
2. Rayner G.B. Jr., Kang D., Zhang Y., Lucovsky G. J. Vac. Sci. Technol. B. 20:2002;1748.
3. Maria J.P., Wicaksana D., Kingon A.I., Busch B., Schulte H., Garfunkel E., Gustafsson T. J. Appl. Phys. 90:2001;3476.
4. Wilk G.D., Wallace R.M., Anthony J.M. J. Appl. Phys. 87:2001;484.
5. Wilk G.D., Wallace R.W., Anthony J.M. J. Appl. Phys. 89:2001;5243.
6. Lucovsky G., Rayner G.B. Jr., Kang D., Appel G., Johnson R.S., Zhang Y., Sayers D.E., Ade H., Whitten J.L. Appl. Phys. Lett. 79:2001;1775.
7. Rayner G.B. Jr., Kang H., Lucovsky G. J. Vac. Sci. Technol. B. 21:2003;1079.
8. Lucovsky G., et al. J. Vac. Soc. Technol. B 20:2002;1739.
9. G. Lucovsky, in: Extended Abstracts of Ultra-Thin Dielectric Workshop, Izu-Atagawa, Japan, January 2003.