Study of radio frequency plasma of silane - argon mixture by optical emission spectroscopy

Czechoslovak Journal of Physics

Volumn 50, Issue SUPPL. 3, 2000, Pages 349-355

  Ray, P P ^a   Chaudhuri, P ^a  

^a DEPARTMENT OF MATERIALS SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2942613463     PISSN: 00114626     EISSN: 15729486     Source Type: Journal    
DOI: 10.1007/BF03165910     Document Type: Article

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