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Materials Research Society Symposium - Proceedings

Volumn 687, Issue , 2002, Pages 63-68

Electrofluidic assembly of nanoelectromechanical systems

(7) Evoy, Stephane a Hailer, Ben a Duemling, Martin a Martin, Benjamin R a Mallouk, Thomas E a Kratochvilova, Irena a Mayer, Theresa S a

a UNIVERSITY OF PENNSYLVANIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; ELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; SEMICONDUCTING SILICON; SENSORS;

ELECTROFLUIDIC ASSEMBLY; NANOELECTROMECHANICAL SYSTEMS; SURFACE NANOMACHINING;

NANOTECHNOLOGY;

EID: 0036354320 PISSN: 02729172 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (2)

References (24)

1
- 0034711368
- Nanoelectromechanical systems
- (2000) Science , vol.290 , pp. 1532
- Craighead, H.G.¹

2
- 0000232061
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2760
- Carr, D.W.¹ Craighead, H.G.²

3
- 0001287420
- (1996) App. Phys. Lett. , vol.69 , pp. 2653
- Cleland, A.N.¹ Roukes, M.L.²

4
- 0000898232
- (1999) J. Appl. Phys. , vol.86 , pp. 6072
- Evoy, S.¹ Carr, D.W.² Sekaric, L.³ Olkhovets, A.⁴ Parpia, J.M.⁵ Craighead, H.G.⁶

5
- 0000033402
- (2000) Appl. Phys. Lett. , vol.77 , pp. 2397
- Evoy, S.¹ Carr, D.W.² Olkhovets, A.³ Sekaric, L.⁴ Parpia, J.M.⁵ Craighead, H.G.⁶

6
- 0000304416
- (2000) Appl. Phys. Lett. , vol.17 , pp. 1545
- Carr, D.W.¹ Evoy, S.² Sekaric, L.³ Olkhovets, A.⁴ Parpia, J.M.⁵ Craighead, H.G.⁶

7
- 0034314868
- (2000) J. Vac. Sci. Technol B , vol.18 , pp. 3549
- Olkhovets, A.¹ Evoy, S.² Carr, D.W.³ Parpia, J.M.⁴ Craighead, H.G.⁵

8
- 0010074444
- MRS Fall 1999 Meeting
- Sekaric, L.¹ Carr, D.W.² Evoy, S.³ Parpia, J.M.⁴ Craighead, H.G.⁵

9
- 0042760419
- (1999) Appl. Phys. Lett. , vol.75 , pp. 920
- Carr, D.W.¹ Evoy, S.² Sekaric, L.³ Parpia, J.M.⁴ Craighead, H.G.⁵

10
- 85010753513
- unpublished
- Barnhart, W.¹ Duemling, M.² Raman, S.³ Evoy, S.⁴

11
- 0000064757
- (2000) Appl. Phys. Lett. , vol.77 , pp. 1399
- Smith, P.A.¹ Nordquist, C.D.² Jackson, T.N.³ Mayer, T.S.⁴ Martin, B.R.⁵ Mbindyo, J.⁶ Mallouk, T.E.⁷

12
- 0003620799
- Standard test method for dynamic young's modulus, shear modulus, and poisson's ratio for advanced ceramics by impulse excitation of vibration
- ASTM C1259-98

13
- 85010813237

14
- 85010752234
- (2000) IEEE J. MEMS , vol.9 , pp. 11
- Yasumura, K.Y.¹ Stowe, T.D.² Chow, E.M.³ Pfafman, T.⁴ Kenny, T.W.⁵ Stipe, B.C.⁶ Rugar, D.⁷

15
- 0034454242
- 2000 Intl. Electron Devices Meeting Technical Digest , pp. 493-496
- Clark, J.R.¹ Hsu, W.-T.² Nguyen, C.T.-C.³

16
- 85010720248
- (2001) J. Vac. Sci. Technol. B , vol.19 , pp. 551
- Yanga, J.¹ Ono, T.² Esashi, M.³

17

18
- 85042080000
- (1998) Nature , vol.396 , pp. 323
- Smith, B.W.¹ Monthioux, M.² Luzzi, D.E.³

19
- 0001352045
- (2001) Appl. Phys. Lett. , vol.78 , pp. 162
- Yang, Y.T.¹ Ekinci, K.L.² Huang, X.M.H.³ Schiavone, L.M.⁴ Roukes, M.L.⁵ Zorman, C.A.⁶ Mehregany, M.⁷

20
- 0010180608
- (1986) Appl. Phys. Lett. , vol.49 , pp. 1284
- Sherer, A.¹ Craighead, H.G.²

21
- 0010188251
- (1989) J. Vac. Sci. Technol. B , vol.7 , pp. 2011
- Clausen, E.M.¹ Craighead, H.G.² Harbison, J.P.³ Scherer, A.⁴ Schiavone, L.M.⁵ Van Der Gaag, B.⁶ Florez, L.T.⁷

22
- 85010800855
- Piscataway, NJ, USA
- Proc. IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems , pp. 229-234
- Kazinczi, R.¹ Mollinger, J.R.² Bossche, A.³

23
- 85010720281
- (unpublished)
- 2000 ASME International Mechanical Engineering Congress and Exposition, Orlando, Florida
- Kazinczi, R.¹ Mollinger, J.R.² Bossche, A.³

24
- 0030246332
- (1996) IEEE J. MEMS , vol.5 , pp. 142-150
- Wilson, C.J.¹ Beck, P.A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.