Laser microprojection for micromechanical device fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2921, Issue , 1997, Pages 684-692

  Rumsby, Phil T ^a   Harvey, Erol C ^a   Thomas, D W ^a  

^a Exitech Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; EXCIMER LASERS; LAMINATES; MANUFACTURE; MASKS; MICROMACHINING; MICROMECHANICS; POLYMERS;

EXPERIMENTAL MECHANICS; MICROFABRICATION; PROTOTYPING;

PROJECTION SYSTEMS;

EID: 0031364412     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)