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Volumn 2921, Issue , 1997, Pages 684-692
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Laser microprojection for micromechanical device fabrication
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CERAMIC MATERIALS;
EXCIMER LASERS;
LAMINATES;
MANUFACTURE;
MASKS;
MICROMACHINING;
MICROMECHANICS;
POLYMERS;
EXPERIMENTAL MECHANICS;
MICROFABRICATION;
PROTOTYPING;
PROJECTION SYSTEMS;
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EID: 0031364412
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (20)
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References (0)
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