Multi-angle generalized ellipsometry of anisotropic optical structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5888, Issue , 2005, Pages 1-11

  Beaudry, Neil A ^a   Zhao, Yanming ^a   Chipman, Russell ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

Anisotropic materials; Biaxial films; Birefringence; Dichroism; Dielectric tensor; Ellipsometry; Polarization

Indexed keywords

ANISOTROPIC MATERIALS; BIAXIAL FILMS; DICHROISM; DIELECTRIC TENSOR;

ALGORITHMS; ANISOTROPY; BIREFRINGENCE; CHARGE COUPLED DEVICES; DATA ACQUISITION; LIQUID CRYSTAL DISPLAYS; OPTICAL PROPERTIES; PERMITTIVITY; POLARIZATION;

ELLIPSOMETRY;

EID: 29244491968     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.618163     Document Type: Conference Paper

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