Recent activities at PTB nanometer comparator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5190, Issue , 2003, Pages 391-399

  Flügge, Jens ^a   Köning, Rainer ^a   Bosse, Harald ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Encoder; Line scale; Vacuum interferometry

Indexed keywords

CHARGE COUPLED DEVICES; ERROR ANALYSIS; INTERFEROMETERS; INTERFEROMETRY; MASKS; NANOSTRUCTURED MATERIALS; OPTICAL BEAM SPLITTERS; OPTICAL MICROSCOPY; SCANNING; SENSORS; VACUUM;

ENCODER; LINE SCALE; NANOMETER COMPARATOR; VACUUM INTERFEROMETRY;

COMPARATORS (OPTICAL);

EID: 2342536435     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.506908     Document Type: Conference Paper

References (8)

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