Dual unit scanning tunneling microscope-atomic force microscope for length measurement based on reference scales

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 780-784

  Zhang, Haijun ^a,b   Huang, Feng ^a   Higuchi, Toshiro ^b,c  

^a ZHEJIANG UNIVERSITY   (China)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; DIFFRACTION GRATINGS; NANOSTRUCTURED MATERIALS; SCANNING TUNNELING MICROSCOPY; SPATIAL VARIABLES MEASUREMENT;

DUAL TUNNELING UNIT; LENGTH METROLOGY;

OPTICAL INSTRUMENTS;

EID: 0031191581     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589408     Document Type: Article

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