Controlled misfit dislocation technology in strained silicon MOSFETs

Semiconductor Science and Technology

Volumn 21, Issue 1, 2006, Pages 44-47

  Wu, San Lein ^a   Wang, Yen Ping ^b   Chang, Shoou Jinn ^b  

^a CHENG SHIU UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRON MOBILITY; LEAKAGE CURRENTS; MOSFET DEVICES; PHOTONS; SILICON;

PHOTON EMISSION MICROSCOPY (PEM); PROCESS CONDITION; VIRTUAL SUBSTRATES;

DISLOCATIONS (CRYSTALS);

EID: 29144518646     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/21/1/008     Document Type: Article

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