Ion track formation below 1 MeV/u in thin films of amorphous SiO 2

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 243, Issue 1, 2006, Pages 119-126

  Jensen, J ^a   Razpet, A ^b   Skupinski M ^a   Possnert, G ^c  

^a UPPSALA UNIVERSITY   (Sweden)

^b JO EF STEFAN INSTITUTE   (Slovenia)

^c UPPSALA UNIVERSITY   (Sweden)

Author keywords

Defects; Ion tracks; Nano pores; Silicon dioxide

Indexed keywords

DEFECTS; ETCHING; ION BEAMS; SCANNING ELECTRON MICROSCOPY; SILICA; THIN FILMS;

ION TRACKS; NANO-PORES;

AMORPHOUS SILICON;

EID: 29144478296     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.07.226     Document Type: Article

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