Experimental optimization of the electron-beam proximity effect forward scattering parameter

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2769-2774

  Rooks, M ^a   Belic, N ^b   Kratschmer, E ^a   Viswanathan, R ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b PDF Solutions GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

POINT-SPREAD ENERGY FUNCTION; PROXIMITY-EFFECT CORRECTION ALGORITHMS; RESIST THICKNESS; RESISTS;

ALGORITHMS; COMPUTER SIMULATION; ELECTRON SCATTERING; ELECTRONS; MATHEMATICAL MODELS; MONTE CARLO METHODS; OPTIMIZATION; SCATTERING PARAMETERS;

ELECTRON BEAMS;

EID: 29044447414     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2062431     Document Type: Article

References (17)

1. B. D. Cook and S.-Y. Lee, J. Vac. Sci. Technol. B 11, 2762 (1993).
2. G. Owen and P. Rissman, J. Appl. Phys. 54, 3573 (1983).
3. M. Parikh, J. Appl. Phys. 50, 4371 (1979).
4. E. Kratschmer, J. Vac. Sci. Technol. 19, 1264 (1981).
5. H. Eisenmann, T. Waas, and H. Hartmann, J. Vac. Sci. Technol. B 11, 2741 (1993).
6. Synopsys Inc., see < http://synopsys.com/products/ntimrg/cats_main_ds. html>
7. S. V. Dubonos, B. N. Gaifullin, H. F. Raith, A. A. Svintsov, and S. I. Zaitsev, Microelectron. Eng. 21, 293 (1993).
8. E. H. Anderson, D. L. Olynick, W. Chao, B. Harteneck, and E. Veklerov, J. Vac. Sci. Technol. B 19, 2504 (2001).
9. K. Mountfield, A. Eckert, X. Yang, and E. Johns, Proc. SPIE 5376, 959 (2004).
10. J. Shu, Z. Cui, and P. D. Prewett, Proc. SPIE 2437, 375 (1995).
11. S. A. Rishton and D. P. Kern, J. Vac. Sci. Technol. B 5, 135 (1987).
12. S. E. Steen, Proceedings SPIE, March 2005, San Jose, CA (to be published).
13. M. J. Rooks, E. Kratschmer, and R. Viswanathan, J. Vac. Sci. Technol. B 20, 2937 (2002).
14. L. E. Ocola, C. J. Biddick, D. M. Tennant, W. K. Waskiewicz, and A. E. Novembre, J. Vac. Sci. Technol. B 16, 3705 (1998).
15. H. Namatsu, J. Vac. Sci. Technol. B 19, 2709 (2001).
16. D. L. Goldfarb, J. J. de Pablo, and P. F. Nealey, J. Vac. Sci. Technol. B 18, 3313 (2000).
17. H. Namatsu, J. Vac. Sci. Technol. B 18, 3308 (2000).