Rapid prototyping of infrared bandpass filters using aperture array lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 3158-3163

  Han, Keping ^a   Morgan, Mark ^b   Ruiz, Ariel ^a   Vemula, Sri C ^a   Ruchhoeft, Paul ^a  

^a UNIVERSITY OF HOUSTON   (United States)

^b EDTEK Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD FILMS; INFRARED BANDPASS FILTERS; ION BEAM APERTURES; LITHOGRAPHY PROCESS;

ARRAYS; BANDPASS FILTERS; GOLD; INFRARED RADIATION; LITHOGRAPHY; THIN FILMS;

RAPID PROTOTYPING;

EID: 29044444966     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2062653     Document Type: Article

References (9)

1. M. D. Morgan, W. E. Horne, V. Sundaram, J. C. Wolfe, S. V. Pendharkar, and R. Tiberio, J. Vac. Sci. Technol. B 14, 3903 (1996).
2. P. Ruchhoeft, J. C. Wolfe, and R. Bass, J. Vac. Sci. Technol. B 19, 2529 (2001).
3. J. N. Randall, D. C. Flanders, N. P. Economou, J. P. Donnelly, and E. I. Bromley, Appl. Phys. Lett. 42, 457 (1983).
4. J. N. Randall, D. C. Flanders, N. P. Economou, J. P. Donnelly, and E. I. Bromley, J. Vac. Sci. Technol. B 1, 1152 (1983).
5. S. V. Pendharkar and J. C. Wolfe, J. Vac. Sci. Technol. B 13, 2588 (1995).
6. U. Behringer and R. Speidel, Optik (Jena) 62, 59 (1982).
7. P. Ruchhoeft, J. C. Wolfe, J. L. Torres, and R. Bass, J. Vac. Sci. Technol. B 20, 2705 (2002).
8. P. Ruchhoeft and J. C. Wolfe, J. Vac. Sci. Technol. B 18, 3177 (2000).
9. K. Han, W. Xu, A. Ruiz, P. Ruchhoeft, and S. Chellam, J. Membr. Sci. 249, 193 (2005).