Effects of nickel and titanium thickness on nickel/titanium ohmic contacts to n-type silicon carbide

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 2, 2005, Pages 486-494

  Park, Jae Hyun ^a   Holloway, Paul H ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NICKLE SILICIDE PHASE; TITANIUM THICKNESS;

DIFFUSION; ELECTRIC POTENTIAL; GRAPHITE; OHMIC CONTACTS; SURFACE ROUGHNESS; TITANIUM;

NICKEL;

EID: 29044443626     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1868694     Document Type: Conference Paper

References (12)

1. M. A. Capano and R. J. Trew, MRS Bull. 22, 19 (1997).
2. V. E. Chelnokov, A. L. Syrkin, and V. A. Dmitriev, Diamond Relat. Mater. 6, 1480 (1997).
3. V. E. Chelnokov and A. L. Syrkin, Mater. Sci. Eng., B 46, 248 (1997).
4. J. Crofton, P. G. McMullin, and J. R. Williams, J. Appl. Phys. 77, 1317 (1995).
5. M. W. Cole, P. C. Joshi, and C. W. Hubbard, J. Appl. Phys. 88, 2652 (2000).
6. J. Crofton, L. M. Porter, and J. R. Williams, Phys. Status Solidi B 202, 581 (1997).
7. T. Marinova, A. KakanakovaGeorgieva, and V. Krastev, Mater. Sci. Eng., B 46, 223 (1997).
8. E. D. Luckowski, J. M. Delucca, and J. R. Williams, J. Electron. Mater. 27, 330 (1998).
9. J. R. Williams, M. J. Bozack, and E. D. Luckowski, Presented at the MRS Symposium Proceedings, San Francisco, 1996.
10. J. H. Park and P. H. Holloway, J. Vac. Sci. Technol. (submitted).
11. C. R. Brundle and C. A. Evans, Encyclopedia of Materials Characterization: Surfaces, Interfaces, Thin Films (Butterworth-Heinemann, Boston, 1992).
12. I. Ohdomari, S. Sha, and H. Aochi, J. Appl. Phys. 62, 3747 (1987).