Measuring line roughness through aerial image contrast variation using coherent exteme ultraviolet spatial filtering techniques

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2844-2847

  Shumway, Michael D ^a,b   Naulleau, Patrick ^b   Goldberg, Kenneth A ^b   Bokor, Jeffrey ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AERIAL IMAGES; LINE EDGE ROUGHNESS; SPACE PATTERNS; SPATIAL FILTERING TECHNIQUES;

COHERENT LIGHT; IMAGE ANALYSIS; IMAGING TECHNIQUES; LIGHT MODULATION; SPATIAL VARIABLES MEASUREMENT; ULTRAVIOLET RADIATION;

SURFACE ROUGHNESS;

EID: 29044439659     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2134717     Document Type: Article

References (9)

1. M. I. Sanchez, W. D. Hinsberg, F. A. Houle, J. A. Hoffnagle, H. Iyo, and C. Nguyen, Proc. SPIE 3678, 160 (1999).
2. M. Shumway, P. Naulleau, K. Goldberg, E. Snow, and J. Bokor, Proc. SPIE Int. Soc. Opt. Eng. 5037, 910 (2003).
3. K. Goldberg, P. Naulleau, P. Denham, S. Rekawa, K. Jackson, J. Liddle, and E. Anderson, Proc. SPIE 5374, 64 (2004).
4. SUMMIT software developed by Patrick Naulleau; http://euvl.com/summit/.
5. H. Cao, J. Roberts, J. Dalin, M. Chandhok, R. Meagley, E. Panning, M. Shell, and B. Rice, Proc. SPIE 5039, 484 (2003).
6. M. Williamson and A. Neureuther, Proc. SPIE 5039, 423 (2003).
7. A. Pawloski, A. Acheta, I. Lalovic, B. La Fontaine, and H. Levinson, Proc. SPIE 5376, 414 (2004).
8. M. Shumway, Ph.D. thesis, University of California, Berkeley, 2004.
9. G. McIntyre and A. Neureuther, Proc. SPIE 5040, 162 (2003).