Dynamic chromatic aberration correction in low energy electron microscopes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2749-2753

  Khursheed, Anjam ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DRIFT CHAMBERS; ELECTRON GUNS; ELECTRON LENSES; ELECTRON MICROSCOPES; MICROELECTRONICS;

CHROMATIC ABERRATION CORRECTION; DRIFT TUBES; FOCAL STRENGTHS; LENS COMBINATION;

ABERRATIONS;

EID: 29044437727     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2062432     Document Type: Article

References (12)

1. J. Zach and M. Haider, Nucl. Instrum. Methods Phys. Res. A 363, 316 (1995).
2. P. Hartel, D. Preikszas, R. Spehr, H. Muller, and H. Rose, Adv. Imaging Electron Phys. 120, 41 (2002).
3. G. Schonhense and H. Spiecker, J. Vac. Sci. Technol. B 20, 2526 (2002).
4. A. Khursheed, Ultramicroscopy 103/4, 255 (2005).
5. A. Khursheed, Optik (Jena) 113, 505 (2002).
6. M. Batiń, D. Begert, and E. Kubalek, Nucl. Instrum. Methods Phys. Res. A 363, 43 (1995).
7. G. Schonhense, A. Oelsner, O. Schmidt, G. H. Fecher, V. Mergel, O. Jagutzki, and H. Schmidt-Bocking, Surf. Sci. 480, 180 (2001).
8. R. M. Tromp, M. Mankos, M. C. Reuter, A. W. Wells, and M. Copel, Surf. Sci. Lett. 5, 1189 (1998).
9. A. Khursheed, The Finite Element Method in Charged Particle Optics (Kluwer Academic, Boston, 1999).
10. J. T. L. Thong, Electron Beam Testing Technology (Plenum, New York/London, 1993), Chap..
11. J. Orloff, Handbook of Charged Particle Optics (CRC Press, New York, 1997), p. 366.
12. C. A. Sanford and N. C. MacDonald, J. Vac. Sci. Technol. B 8, 1853 (1990).