A method of dynamic chromatic aberration correction in low-voltage scanning electron microscopes

Ultramicroscopy

Volumn 103, Issue 4, 2005, Pages 255-260

  Khursheed, Anjam ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Chromatic aberration; Low voltage scanning electron microscope; Time of flight spectrometer

Indexed keywords

ELECTRON GUNS; IMAGE RECONSTRUCTION; SCANNING ELECTRON MICROSCOPY; VOLTAGE MEASUREMENT;

DYNAMIC CHROMATIC ABERRATION; IMAGE RESOLUTION; SPATIAL RESOLUTION; TIME-OF-FLIGHT;

ABERRATIONS;

ARTICLE; COLORIMETRY; ELECTRON; ENERGY; IMAGE QUALITY; PREDICTION; SCANNING ELECTRON MICROSCOPY; STATISTICAL SIGNIFICANCE; TIME OF FLIGHT MASS SPECTROMETRY;

EID: 18844432816     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2004.12.005     Document Type: Article

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