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Volumn 113, Issue 11, 2002, Pages 505-509

A low voltage time of flight electron emission microscope

Author keywords

Electron emission microscopy; Time of flight spectroscopy

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; OPTICAL DESIGN; PHOTOEMISSION; SECONDARY EMISSION;

EID: 0036995789     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1078/0030-4026-00202     Document Type: Article
Times cited : (11)

References (11)
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    • Stohr J, Sanders S: X-ray spectroscopy of complex materials and surfaces, IBM J. Res. Dev. 44 (2000) 535-551
    • (2000) IBM J. Res. Dev. , vol.44 , pp. 535-551
    • Stohr, J.1    Sanders, S.2
  • 2
    • 4243543689 scopus 로고    scopus 로고
    • Apparatus and method for secondary electron emission microscope
    • US patent, 6,087,659, July
    • Adler DL, Walker DJ, Babian F, Wolfe T: Apparatus and method for secondary electron emission microscope. US patent, 6,087,659, July (2000)
    • (2000)
    • Adler, D.L.1    Walker, D.J.2    Babian, F.3    Wolfe, T.4
  • 3
    • 85031225323 scopus 로고    scopus 로고
    • The Focus PEEM System. Omicron Vakuumphysik GMBH, Idsteiner Straße 78, D-65232 Taunsstein, Germany
    • The Focus PEEM System. Omicron Vakuumphysik GMBH, Idsteiner Straße 78, D-65232 Taunsstein, Germany
  • 5
    • 0032049341 scopus 로고    scopus 로고
    • Time-of-flight photoelectron emission microscopy TOF-PEEM: First results
    • Spiecker H et al.: Time-of-Flight Photoelectron Emission Microscopy TOF-PEEM: first results. Nucl. Instrum. Methods Phys. Res. A 406 (1998) 499-506
    • (1998) Nucl. Instrum. Methods Phys. Res. A , vol.406 , pp. 499-506
    • Spiecker, H.1
  • 7
    • 0036093756 scopus 로고    scopus 로고
    • Ultimate resolution limits for scanning electron microscope immersion objective lenses
    • Khursheed A: Ultimate resolution limits for scanning electron microscope immersion objective lenses. Optik 113 (2002) 67-77
    • (2002) Optik , vol.113 , pp. 67-77
    • Khursheed, A.1
  • 8
    • 0003732854 scopus 로고    scopus 로고
    • The finite element method in charged particle optics
    • Kluwer Academic Publishers, Boston
    • Khursheed A: The finite element method in charged particle optics. Kluwer Academic Publishers, Boston 1999
    • (1999)
    • Khursheed, A.1
  • 10
    • 0029697463 scopus 로고    scopus 로고
    • Addition of different contributions to the charged particle probe size
    • Barth JE, Kruit P: Addition of different contributions to the charged particle probe size. Optik 101 (1996) 101-109
    • (1996) Optik , vol.101 , pp. 101-109
    • Barth, J.E.1    Kruit, P.2
  • 11
    • 0013229868 scopus 로고
    • chapter 3; In Thong JTL (ed.): Electron beam testing technology. Plenum Press, New York
    • Dinnis AR: Essential Electron Optics. chapter 3 pp. 143. In Thong JTL (ed.): Electron beam testing technology. Plenum Press, New York 1993.
    • (1993) Essential Electron Optics. , pp. 143
    • Dinnis, A.R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.