Correction of chromatic and spherical aberration in electron microscopy utilizing the time structure of pulsed excitation sources

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 6, 2002, Pages 2526-2534

  Schonhense G ^a   Spiecker, H ^b  

^a JOHANNES GUTENBERG UNIVERSITY   (Germany)

^b LaVision Biotec GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ELECTRON MICROSCOPY; LASER PULSES; MIRRORS; OPTICAL SYSTEMS; PHOTOCATHODES; PHOTOEMISSION; PHOTONS; SYNCHROTRON RADIATION;

CHROMATIC ABERRATION; ELECTRICAL ACCELERATION; ELECTRON OPTICAL COLUMN; ELECTRON STORAGE RINGS; LOW ENERGY ELECTRON MICROSCOPY; PULSED EXCITATION SOURCES; ROUND LENS SYSTEMS; SPHERICAL ABERRATION;

LENSES;

EID: 0036883119     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1523373     Document Type: Article

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