Nontranslational three-dimensional profilometry by chromatic confocal microscopy with dynamically configurable micromirror scanning

Applied Optics

Volumn 39, Issue 16, 2000, Pages 2605-2613

  Cha, Sungdo ^b   Lin, Paul C ^a   Zhu, Lijun ^a   Sun, Pang Chen ^a   Fainman, Yeshaiahu ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Kangwon National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENCE; INTEGRATED CIRCUITS; LIGHT SCATTERING; MICROPROCESSOR CHIPS; MIRRORS; PROFILOMETRY;

MICROMIRRORS;

DIFFRACTIVE OPTICS;

EID: 0000188158     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.002605     Document Type: Article

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