Highly accurate non-contact characterization of engineering surfaces using confocal microscopy

Measurement Science and Technology

Volumn 9, Issue 7, 1998, Pages 1142-1151

  Jordan, H J ^a   Wegner, M ^a   Tiziani, H ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

STANDARDS; SURFACE ROUGHNESS;

COMPLEX ENGINEERING SURFACES; CONFOCAL MICROSCOPY;

MICROSCOPIC EXAMINATION;

EID: 0032114470     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/9/7/023     Document Type: Article

References (21)