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Surface and Coatings Technology

Volumn 200, Issue 5-6, 2005, Pages 1560-1565

The effect of pulse sequence modulation and pulse energy on structural coating properties and coating composition

(3) Bobzin, K a Lugscheider, E a Maes, M a

a RWTH AACHEN UNIVERSITY (Germany)

Author keywords

CrAlN; DMS dual magnetron sputtering; PMS pulsed magnetron sputtering; Pulse sequence modulation

Indexed keywords

CHROMIUM COMPOUNDS; COMPOSITION; CRYSTAL MICROSTRUCTURE; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; PLASMA DIAGNOSTICS; SPUTTER DEPOSITION; THIN FILMS;

COATING COMPOSITION; COATING PROPERTIES; DUAL MAGNETRON SPUTTERING; PULSE ENERGY; PULSE SEQUENCE MODULATION; PULSED MAGNETRON SPUTTERING;

INORGANIC COATINGS;

COATING;

EID: 28844478493 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.08.064 Document Type: Article

Times cited : (10)

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