The disappearing anode myth: Strategies and solutions for reactive PVD from single magnetrons

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 184-188

  Sellers, Jeff C ^a  

^a Eni E and P   (United States)

Author keywords

Disappearing anode; Dual magnetron systems; Magnetron sputtering; Reactive sputtering

Indexed keywords

ANODES; DIELECTRIC FILMS; PLASMA APPLICATIONS; VAPOR DEPOSITION;

DISAPPEARING ANODES; DUAL MAGNETRON SYSTEMS; PHYSICAL VAPOR DEPOSITION (PVD); REACTIVE SPUTTERING;

MAGNETRON SPUTTERING;

EID: 0031250481     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00438-6     Document Type: Article

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