Power systems for reactive sputtering of insulating films

Surface and Coatings Technology

Volumn 93, Issue 1, 1997, Pages 7-13

  Scholl, R A ^a  

^a Advanced Energy Industries Incorporated   (United States)

Author keywords

Dielectric; Dual magnetron; Insulators; Pulsed; PVD; Reactors; Sputtering

Indexed keywords

CATHODES; DIELECTRIC FILMS; ELECTRIC INSULATING COATINGS; ELECTRIC POWER SUPPLIES TO APPARATUS; VAPOR DEPOSITION;

DIRECT CURRENT SPUTTERING; DUAL CATHODE SPUTTERING; PHYSICAL VAPOR DEPOSITION (PVD); REACTIVE SPUTTERING; SINGLE TARGET SPUTTERING;

SPUTTER DEPOSITION;

EID: 0031198294     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00032-7     Document Type: Article

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