Deposition of AlN on Al substrates by reactive magnetron sputtering

Surface and Coatings Technology

Volumn 200, Issue 5-6, 2005, Pages 1768-1776

  Figueroa, U ^a   Salas, O ^a   Oseguera, J ^a  

^a SCHOOL OF ENGINEERING AND SCIENCES   (Mexico)

Author keywords

Aluminum nitride; Reactive magnetron sputtering

Indexed keywords

ADHESION; ALUMINUM; DENSITY (SPECIFIC GRAVITY); DEPOSITION; DUCTILITY; HARDNESS; MAGNETRON SPUTTERING; MICROHARDNESS; SUBSTRATES; SURFACE ROUGHNESS;

ADHESION LAYER; INTERCOLUMNAR COHESION; REACTIVE MAGNETRON SPUTTERING;

ALUMINUM NITRIDE;

COATING;

EID: 28844474971     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.08.051     Document Type: Article

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