Improving metrology for micro-optics manufacturing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5177, Issue , 2003, Pages 67-81

  Davies, Angela ^a   Bergner, Brent ^a   Gardner, Neil ^b  

^a UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

^b UNIVERSITY OF FLORIDA   (United States)

Author keywords

Metrology; Micro optics; Optical testing; Self calibration

Indexed keywords

GRADIENT INDEX (GRIN) LENSES; MICRO-IMAGING SYSTEMS; MICRO-OPTICS MANUFACTURING; SELF CALIBRATION;

IMAGING SYSTEMS; LENSES; LIGHT REFRACTION; MICROELECTRONICS; OPTICAL COMMUNICATION; OPTICAL FIBERS; OPTICAL SYSTEMS; OPTICAL TESTING; OPTICAL VARIABLES MEASUREMENT; OPTOELECTRONIC DEVICES;

MICROOPTICS;

EID: 2342514832     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.505057     Document Type: Conference Paper

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