Detailed comparison between probe density measurements of glow discharge in argon and in helium

Journal of Quantitative Spectroscopy and Radiative Transfer

Volumn 97, Issue 1, 2006, Pages 58-67

  Elghazaly, Mohammed H ^a   Abdel baky, A M ^a   Mansour, M M ^a   Gabr, M ^a   Elsayed, N M ^a  

^a ZAGAZIG UNIVERSITY   (Egypt)

Author keywords

Argon and helium glow discharges; Electron and ion densities; OML and Laframboise theories

Indexed keywords

ARGON; ELECTRON DENSITY MEASUREMENT; HELIUM; IONS; PLASMAS;

ION DENSITY; LAFRAMBOISE THEORY; ORBITAL MOTION LIMIT (OML) THEORY;

GLOW DISCHARGES;

ELECTRON DENSITY;

EID: 28644445491     PISSN: 00224073     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jqsrt.2004.12.029     Document Type: Article

References (22)

1. N.St.J. Braithwaite Introduction to gas discharges Plasma Sources Sci Technol 9 2000 517-527
2. B. Lipschultz I. Hutchinson B. LaBombard W. Wan Electric probes in plasmas J Vac Sci Technol 4 1986 1810
3. V.A. Godyak R.B. Piejak B.M. Alexandrovich Probe diagnostics of non-Maxwellian plasmas J Appl Phys 73 1993 3657-3663
4. J.M. Hendron M.O. Mahony T. Morrow W.G. Graham Langmuir probe measurements of plasma parameters in the late stages of a laser ablated plume J Appl Phys 81 1997 2131-2134
5. F.F. Chen Plasma diagnostic techniques In: R.H. Huddle-stone S.L. Leonard editors. 1965 Academic New York
6. M.B. Hopkins Langmuir probe measurements in the gaseous electronic conference rf reference cell J Res Natl Inst Stand Technol 100 1995 415-425
7. Laframboise JG. Theory of spherical and cylindrical Langmuir probes in a collisionless, Maxwellian plasma at rest. University of Toronto, Institute for Aerospace studies, Report No 100, 1966.
8. C.K. Kim Analysis of Langmuir probe data in high density plasmas Korean J Chem Eng 21 2004 746-751
9. I. Langmuir H. Mott-Smith Langmuir probe technique General Electric Rev 27 1924 449
10. D. Fang R.K. Marcus Use of a cylindrical Langmuir probe for the characterization of charged particle populations in a planar, diode glow discharge device Spectrochimica Acta 45B 1990 1053-1074
11. Elghazaly MH, Abdel baky AM, Mansour MM, Elsayed NM. Comparative investigations of axial and radial profiles of the plasma parameters in direct current glow discharge. Seventh radiation physics conference, Egypt 2004, submitted.
12. T.S. Basha A. Abbas Langmuir probe determination of charged particles in Ar and He discharge plasma J Phys Soc Japan 62 1993 4255-4261
13. D. Batani S. Alba P. Lombardi A. Galassi Use of Langmuir probes in a weakly ionized, steady-state plasma with strong magnetic field Rev Sci Instrum 68 1997 4043-4050
14. R.M. Castro G.A. Cirino P. Verdonck A comparative study of single and double Langmuir probe techniques for rf plasma characterization Contrib Plasma Phys 39 1999 235-246
15. Abdel baky AM, Elghazaly MH, Mansour MM, Elsayed NM. The experimental electron energy distribution function (EEDF) and pressure dependence in argon and helium discharge plasmas. Arab J Nucl Sci Appl 2005, accepted for publication.
16. D. Fang R.K. Marcus Effect of discharge conditions and cathode identity on charged particle populations in the negative glow region of a simple diode glow discharge Spectrochimica Acta 46B 1991 983-1000
17. M. Belkin J.A. Caruso S.J. Christopher R.K. Marcus Characterization of helium/argon working gas systems in a radiofrequency glow discharge atomic emission source Spectrochimica Acta 53B 1998 1197-1208
18. Y. Ye R.K. Marcus Langmuir probe study of the charged particle characteristics in an analytical radio frequency glow discharge. Role of discharge conditions and sample conductivity Spectrochim Acta 51B 1996 509-531
19. E. Passoth P. Kudrna C. Csambal J.F. Behnke M. Tichy An experimental study of plasma density determination by a cylindrical Langmuir probe at different pressures and magnetic fields in a cylindrical magnetron discharge in heavy rare gases J Phys D: Appl Phys 30 1997 1763-1777
20. T. Kimura K. Ohe Pressure dependencies of electron energy distribution and power dissipation in symmetrical rf helium discharges J Phys D: Appl Phys 27 1994 1465-1469
21. K. Dzierzega K. Musiol E.C. Benck J.R. Roberts Electron density measurement in an rf helium plasma by laser-collision induced fluorescence method J Appl Phys 80 1996 3196-3201
22. K.E. Greenberg G.A. Hebner Electron and metastable densities in parallel-plate radio-frequency discharges J Appl Phys 73 1993 8126-8133